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RAS Nano & ITМикроэлектроника Russian Microelectronics

  • ISSN (Print) 0544-1269
  • ISSN (Online) 3034-5480

Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

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PII
10.31857/S0544126923700229-1
DOI
10.31857/S0544126923700229
Publication type
Status
Published
Authors
E. A. Kerimov
  • Affiliation: Azerbaijan Technical University
Volume/ Edition
Volume 52 / Issue number 2
Pages
160-164
Abstract
When studying the optical properties of thin films, in order to obtain reliable information about the magnitude of their optical constants, it is necessary to accurately measure the thickness of the metal. Thickness 600 < d < 1500 Å is measured by the method of multibeam interferometry and the resonant-frequency method.
Keywords
резонансно-частотный метод оптические постоянные метод многолучевой интерферометрии кварцевой элемент
Date of publication
16.09.2025
Year of publication
2025
Number of purchasers
0
Views
17

References

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  3. 3. Byrne C.F., Knowles P. Infrared formed in mercury cadmium telluride grown by MOCVD // Semicond. Sci. Technol. 1988. № 3. P. 377–381.
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