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A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering
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A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering
Annotation
PII
S0544126924030019-1
Publication type
Article
Status
Published
Authors
A. S. Rudy 
Affiliation: Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch
S. V. Kurbatov
Affiliation: Valiev Institute of Physics and Technology of RAS, Yaroslavl Branch
Edition
Volume 53 Issue number 3
Pages
189-205
Abstract
The influence of nonuniformity properties of the LiCoO2 cathode film deposited by magnetron sputtering on the capacity of all-solid-state thin-film lithium-ion batteries (ASSLib) was studied. It was found that the film nonuniformity corresponds to the magnetron plasma density distribution and the angular distribution of sputtered particles. The capacity distribution of the ASSLib with LiCoO2 cathode depending on the distance to the substrate center was studied. The maximum capacity corresponded to the dense part of the toroidal region of the magnetron plasma. It was determined that the main causes of batteries capacity decline in the central part and on the edge of the substrate are the impurity phase of lithium cobaltate and the smaller thickness of the cathode layer, respectively.
Keywords
ВЧ магнетронное распыление неоднородность катодного слоя разброс удельной емкости тонкопленочный литий-ионный аккумулятор
Acknowledgment
The work was performed within the framework of the State assignment of the Yaroslavl branch of the K.A. Valiev Institute of Physics and Technology of the Russian Academy of Sciences on the topic No. FFNN-2022-0017 on the equipment of the Center for Collective Use “Diagnostics of micro- and nanostructures”.
Received
27.10.2024
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