RAS Nano & ITМикроэлектроника Russian Microelectronics

  • ISSN (Print) 0544-1269
  • ISSN (Online) 3034-5480

O. A. Soltanovich

Author ID
103878

By this author

  • Hydrogen Plasma under Conditions of Electron-Cyclotron Resonance in Microelectronics Technology

Индексирование

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Higher Attestation Commission

At the Ministry of Education and Science of the Russian Federation

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Scientific Electronic Library