- PII
- S0544126925030081-1
- DOI
- 10.31857/S0544126925030081
- Publication type
- Article
- Status
- Published
- Authors
- Volume/ Edition
- Volume 54 / Issue number 3
- Pages
- 261-270
- Abstract
- The technology of self-assembly of three-dimensional cubic mesostructures is presented, based on ion-plasma action on certain local areas of flat blanks formed from Cr and Cr/SiO films. The driving force of self-assembly is the stress gradient arising in chromium during ion bombardment in the plasma of Ar RF induction discharge. Folding of the blank into a three-dimensional structure occurs when the elements of the blank are suspended as a result of etching of the underlying silicon.
- Keywords
- самосборка мезоструктура механические напряжения плазма ионная бомбардировка
- Date of publication
- 16.09.2025
- Year of publication
- 2025
- Number of purchasers
- 0
- Views
- 17
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