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D. B. Murin
D. B. Murin
Author ID:
82319
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Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma
23
0
08.06.2025
Plasmochemical and Reactive Ion Etching of Gallium Arsenide in Difluorodichloromethane with Helium
18
0
08.06.2025
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