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A. V. Miakonkikh

Author ID: 82293

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Parameters and Composition of Plasma in a Mixture of CF<sub>4</sub> + H<sub>2</sub> + Ar: Effect of the CF<sub>4</sub>/H<sub>2</sub> Ratio

23

07.06.2025

Gas Phase Composition and Fluorine Atom Kinetics in SF<sub>6</sub> Plasma

23

07.06.2025