RAS Nano & ITМикроэлектроника Russian Microelectronics

  • ISSN (Print) 0544-1269
  • ISSN (Online) 3034-5480

A. Yu. Grazhdyan

Author ID
104022

By this author

  • Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma

Индексирование

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Crossref

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Higher Attestation Commission

At the Ministry of Education and Science of the Russian Federation

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Scientific Electronic Library