RAS Nano & ITМикроэлектроника Russian Microelectronics

  • ISSN (Print) 0544-1269
  • ISSN (Online) 3034-5480

Study of the Sensor Properties of Ordered ZnO Nanorod Arrays for the Detection of UV Radiation

PII
10.31857/S0544126923700436-1
DOI
10.31857/S0544126923700436
Publication type
Status
Published
Authors
Volume/ Edition
Volume 52 / Issue number 4
Pages
322-328
Abstract
Zinc oxide is one of the most promising materials used to create devices in the ultraviolet (UV) range. In this article, we study the sensor properties of ordered ZnO nanorod arrays grown by chemical vapor deposition. The possibility of their use as an indicator of UV radiation to control the dose of UV radiation, both from natural and artificial light sources, is assessed. The X-ray diffraction, Raman spectroscopy (RS), and cathodoluminescence (CL) data demonstrate the high quality of nanorods. Based on the ZnO nanorod array, a sensor prototype was fabricated based on the change in ZnO conductivity under the UV irradiation. A compari-son of the response of such a sensor with the readings of a UV radiometer showed a high correlation.
Keywords
массивы наностержней ZnO широкозонный полупроводник сенсорные свойства УФ детекторы фоточувствительность
Date of publication
16.09.2025
Year of publication
2025
Number of purchasers
0
Views
19

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